Deterministic form-position deflectometric measurement of monolithic multi-freeform optical structures via Bayesian multisensor fusion

Abstract

Monolithic multi-freeform optical structures play significant roles in advanced optical systems by simplifying system structures and enhancing optoelectronic performance. However, manufacturing and measurement present significant challenges, which require the simultaneous assurance of form quality and relative positioning of multiple functional surfaces. Consequently, a deterministic form-position deflectometric measuring method is proposed based on Bayesian multisensor fusion, which effectively overcomes the inherent limitation of deflectometry in absolute positioning. Calibration priors were marginalised in the measurement model to improve fidelity, and a fully probabilistic measurement framework was proposed to eliminate numerical bias in conventional sequential optimisation approaches. Finally, a geometric-constraint-based registration method was developed to evaluate the form-position quality of freeform surfaces. The experimental results demonstrated the measurement accuracy could achieve a level of one hundred nanometres for surface forms and a few microns for surface positions.

Keywords

• form-position measurement
• phase measuring deflectometry
• multi-sensor fusion
• monolithic freeform structure
• bayesian estimation