AFM research of morphology of surface layer sapphire after plasma surface treatment

Abstract

An AFM study of the sapphire surface after plasma treatment was carried out. The AFM images of the sapphire surface in the initial state and after plasma treatment are obtained. It is established that after plasma treatment the arithmetic mean deviation of the surface profile increases and the surface becomes more homogeneous.

Keywords

• plasma
• scanning probe microscopy
• atomic force microscopy
• sapphire